Logo der Physikalisch-Technischen Bundesanstalt

Kalibrierstandards

Referenzen
default
D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, D. Gaoliang, R. Dixson, W. Haessler-Grohne, K. Hahm, M. Wurm
SPIE Conference on Scanning Microscopies, Monterey, USA, 29, September - 01, October, 2015
Scanning Microscopies 2015 ; (Proceedings of SPIE Band 9636 (2015) , Seite 96360S-1 - 96360S -14
default
E. Agocs, B. Loechel, F. Scholze, B. Bodermann, G. Dai, J. Endres, J. Probst, L. Nielsen, M. Wurm, S. Burger, P.-E. Hansen, M. Krumrey, M. H. Madsen, S. Heidenreich, V. Soltwisch
Optics and Photonics 2015, San Diego, USA, 09-13, August, 2015
Nanoengineering: Fabrication, Properties, Optics, and Devices XII ; Proceedings of SPIE Band 9556 (2015)

[CD-ROM] file name 9556_38.pdf, 955610-1 - 955610-12Copyright: SPIE, The International Society for Optical Engineering

pdf
B. Bodermann, B. Loechel, F. Scholze, J. Endres, J. Probst, M. Wurm, M. Schoengen, M. Krumrey, S. Burger, V. Soltwisch
Frontiers of Characterization and Metrology for Nanoelectronics 2015, Dresden, Germany, 14-16, April, 2015
Frontiers of characterization and metrology for nanoelectronics 2015 (2015) , Seite 125-127
default
B. Bodermann, B. Loechel, F. Scholze, G. Dai, J. Wernecke, J. Endres, J. Probst, M. Schoengen, M. Krumrey, P.-E. Hansen, V. Soltwisch
SPIE Photonics Europe, Brussels, Belgium, 14-17, April, 2014
Optical Micro- and Nanometrology V ; Proceedings of SPIE Band 9132 (2014)

91320A-1 - 91320A-12

default
B. Bodermann, P.-E. Hansen, S. Burger, M.-A. Henn, H. Gross, M. Baer, F. Scholze, J. Endres, M. Wurm
SPIE Optics and Photonics 2012, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, Calif., USA, 12-16, August, 2012
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI ; Proceedings of SPIE Band 8466 (2012)

84660E-1 - 84660E-12

default
B. Bodermann, D. Bergmann, E. Buhr, W. Haessler-Grohne, H. Bosse, J. Potzick, R. Dixon, R. Quintanilha, M. Stocker, A. Vladar, N. G. Orji
SPIE Conference on Photomask Technology 2009, Monterey, USA, 14-18, September, 2009
Photomask Technology 2009 ; Proceedings of SPIE on CD-ROM Band 7488 (2009)

[CD-ROM] file name: 7488-51.pdf, 74881H-1 - 74881H-14

default
J. Potzick, R. Dixson, R. Quintanilha, M. Stocker, A. Vladar, E. Buhr, W. Haessler-Grohne, B. Bodermann, C. G. Frase, H. Bosse
SPIE Conference on Photomask Technology 2008, Monterey, USA, 06-10, October, 2008
Photomask Technology 2008 ; Proceedings of SPIE on CD-ROM Band 7122 (2008)

[CD-ROM] file name: 7122_97.pdf, 71222P-1 - 71222P-14

default
J. Richter, T. Heins, R. Liebe, B. Bodermann, A. Diener, D. Bergmann, C. G. Frase, H. Bosse
23th European Mask and Lithography Conference EMLC (Former EMC), Grenoble, France, 22-25, January, 2007
EMLC 2007 : 23th European Mask and Lithography Conference ; Proceedings of SPIE Band 6533 (2007)

[CD-ROM] file name: 6533_53.pdf, 65330S-1 - 65330S-10

default
M. Arnz, W. Haessler-Grohne, B. Bodermann, H. Bosse
22th European Mask and Lithography Conference EMLC (Former EMC), Dresden, Germany, 23-26, January, 2005
EMLC 2006 : 22th European Mask and Lithography Conference EMLC ; GMM-Fachbericht: 49 oder als Proc. SPIE 6281 (2006) , Seite 103-114
default
F. Gans, R. Liebe, J. Richter, T. Schaetz, B. Hauffe, F. Hillmann, S. Doebereiner, H.-J. Brueck, G. Scheuring, B. Brendel, L. Bettin, K.-D. Roeth, W. Steinberg, G. Schlueter, P. Speckbacher, W. Sedlmeier, T. Scherübl, W. Haessler-Grohne, C. G. Frase, S. Czerkas, K. Discherl, B. Bodermann, W. Mirandé, H. Bosse
21th European Mask and Lithography Conference EMLC (Former EMC), Dresden, Germany, 31, January - 03, February, 2005
EMLC 2005 : 21th European Mask and Lithography Conference EMLC (former EMC) ; GMM-Fachbericht Band 45 (2005) , Seite 109-119
default
W. Haessler-Grohne, C. G. Frase, S. Czerkas, K. Dirscherl, B. Bodermann, W. Mirandé, G. Ehret, H. Bosse
25th Annual BACUS Symposium Photomask Technology, Monterey, USA, 04-07, October, 2005
BACUS Symposium on Photomask Technology 2005 and Photomask Japan ; Proceedings of SPIE Band 5992 (2005) , Seite 159
default
C. G. Frase, B. Bodermann, W. Haessler-Grohne, S. Czerkas, H. Bosse, W. Mirandé
PTB-Mitteilungen 114(1), 36-43 ( 2004)
Seite:  
Zurück | 1, 2 | Weiter