Referenzen
5th EOS Topical Meeting on Advanced Imaging Techniques, Engelberg, Switzerland, 29 June - 02, July, 2010
5th EOS Topical Meeting on Advanced Imaging Techniques
(2010)
CD-ROM |
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Euspen, Delft, The Netherlands, 31, May - 04, June, 2010
Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology
Band 1
(2010)
, Seite 43-46
|
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26th European Mask and Lithography Conference, Grenoble, France, 18-20, January, 2010
26th European Mask and Lithography Conference; Proceedings of SPIE
Band 7545
(2010)
DOI: 10.1117/12.863627
CD-ROM file name: 7545_15.pdf, 75450A-1 - 75450A-9 |
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DGaO-Jahrestagung, Wetzlar, Germany, 25-29, Mai, 2010
DGaO-Proceedings
Band 111
(2010)
Online only |
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Measurement Science and Technology 20(8), 084010-1 - 084010-10 ( 2009) | |
Photomask Technology 2009; Proceedings of SPIE on CD-ROM
Band 7488
(2009)
DOI: 10.1117/12.829629
CD-ROM file name: 7488-53.pdf, 74881J-1 - 74881J-9 |
|
4th EOS Topical Meeting on Advanced Imaging Technique, Jena, Germany, 10-12, June 2009
4th EOS Topical Meeting on Advanced Imaging Techniques
(2009)
, Seite 42-43
|
|
109. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Esslingen, Germany, 13-17, May, 2008
DGaO-Proceedings
Band 109
(2008)
, Seite 34
PosterOnline only |
|
SPIE Conference Optical Metrology in Production Engineering, Strasbourg, France, 26-30, April, 2004
Optical metrology in production engineering; Proceedings of SPIE
Band 5457
(2004)
, Seite 35-43
|