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Diffraktometrie (Gitterkonstanten mittels optischer Beugung)

Referenzen
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J. Decker, E. Buhr, A. Diener, B. Eves, A. Kueng, F. Meli, J. R. Pekelsky, S.-P. Pan, B.-C. Yao
Metrologia 46 ( 2009)

Tech. Suppl., 04001 [Online only]

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D. Chernoff, E. Buhr, D. Burkhead, A. Diener
Advanced Lithography 2008, San Jose, USA, 22-27, February, 2008
Metrology, inspection, and process control for microlithography XXII; Proceedings of SPIE Band 6922 (2008) , Seite 69223J-1 - 69223J-11

Copyright: SPIE, The International Society for Optical Engineering

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J. Garnaes, K. Discherl
Final Report
Herausgeber: IOP Science,
2008

The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).

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E. Buhr, W. Michaelis, A. Diener, W. Mirandé
Measurement Science and Technology 18, 667-674 ( 2007)
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E. Buhr, W. Michaelis, A. Diener
107. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Weingarten, Germany, 06-10, June, 2006
DGaO-Proceedings Band 107 (2006)

Online only, P46(Poster)

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G. Dai, L. Koenders, F. Pohlenz, T. Dziomba, H.-U. Danzebrink
Measurement Science and Technology 16(6), 1241 - 1249 ( 2005)